Environmental Monitoring

Enhanced Environmental Monitoring of Semiconductor Wastewater Streams

In order to minimize the environmental effects of semiconductor manufacturing processes whilst maintaining profitability, stable and robust instrument performance is needed. Effective analysis solutions are required for the detection of a variety of trace level pollutants generated during semiconductor fabrication. With Agilent’s ICP-MS, ICP-OES, and ICP-MS/MS devices, you can ensure the accurate quantification of such pollutants, including organic solvents, acids, bases, salts, and heavy metals.

Our instruments, enhanced by cutting-edge sample prep and handling automation, ensure the highest levels of regulatory compliance and quality control in the analysis of semiconductor wastewater streams. We have decades of experience in environmental monitoring and analysis, and help ensure the safety of all our clients semiconductor manufacturing processes, from silicon growth and oxidation, to photolithography and cleaning.