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Primary/Medium Vacuum Pumps

Primary/Medium Vacuum Pumps

High Speed, Oil-Free Backing Dry Scroll and Rotary Vane Pumps

Agilent offers a vast range of reliable high speed, low cost backing pumps. The IDP and TriScroll series dry scroll pumps are ideal for backing turbo pumps to eliminate risks of system contamination. DS series rotary vane pumps and RPS roots pumping systems are ideal for backing diffusion pumps to guarantee fast roughing.

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