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Non-Evaporable Getter (NEG) Combination Ion Pumps

Ion Pumps & Controllers

Ion Pumps and Control Units for Ultra High (UHV) and Extreme High Vacuum (XHV)

Agilent Vacuum (formerly Varian) offers a complete portfolio of VacIon ion pumps that provide various pumping speeds (from 0.4 to 1000 L/s). Agilent also supplies smart combinations titanium sublimation pumps (Ion CombiTSP) and Non-Evaporable Getter (Ion CombiNEG) pumps for clean and vibration-free environments.

Agilent ion pumps and controllers can be customized in a number of configurations to satisfy your vacuum requirements. They are the best choice for those applications where stable ultrahigh or extreme-high vacuum (UHV or XHV) conditions are essential, such as: laboratories, large research facilities, medical devices, scanning electron microscopes, and surface analysis tools.

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