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VacIon Plus 40 Pump

VacIon Plus 40 Pump

VacIon Plus 40 Pump

The Agilent VacIon Plus 40 pump is a medium-sized 40 L/s ion pump for use in general-purpose UHV and XHV systems for evacuating electron devices, scanning electron microscopes (SEM), and in academic and high-energy physics (HEP) research.

This pump delivers stable vacuum and low leakage current, protecting critical components in SEM applications. The combination of our patented anode design and StarCell element deliver a powerful solution to optimize E-beam columns. User-selected options like high-voltage (HV) feedthroughs are available for easy system integration.

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