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Vacuum Beyond Specifications

Vacuum beyond specifications

You need a vacuum solution that instills confidence in even the toughest applications. Agilent is committed to becoming the supplier you trust to deliver that confidence.

Picking a pump that meets your specifications is an important first step. But ensuring stable, long-lived vacuum doesn’t end there. You need a solution that reaches beyond the pump—a solution that incorporates new thinking, deep applications experience, and unparalleled product delivery and support.

Our quest is to transform every aspect of the vacuum solutions we offer, to ensure they meet the demands of today’s and tomorrow’s challenges.

New pump design innovations, backed by exhaustive testing and QC, spanning the full spectrum of vacuum applications

Solutions for Dry Primary Vacuum Applications

Dry Scroll Pumps: Oil-free, worry-free, transformative.

Solutions for High Vacuum Applications

Turbo Pumps: Compact, reliable, energy-efficient, and best-in-class.

Solutions for Ultra-High Vacuum Applications

Ion Pumps: A history of continuous innovation in ultra-high vacuum.

IDP Dry Scroll Pumps

More than just clean, compact alternatives to conventional oil-sealed pumps, Agilent scroll pumps reflect the spirit of Agilent innovation, and our collaborative efforts to bring industry-changing ideas to fruition.

Find out how they work. Download the infographic here.

Look inside an Agilent IDP Inlet Isolation Valve


TwisTorr FS Turbo Pumps

Compact, reliable, energy-efficient, and best-in-class, these 80- and 300-l/s turbo drag packages incorporate breakthrough technologies for outstanding performance, reliability, and quality. See product details here.

Agilent Floating Suspension (FS)

A new solution for reducing vibration and acoustical noise and increasing stability over time. See how it works.

Testing the TwisTorr 304 FS

Development of the 304 FS included a comprehensive series of tests and analysis to verify pump performance and robustness are ready to meet customers’ most demanding challenges. See how TwisTorr pumps are tested.

Take a look inside an Agilent TwisTorr pump


VacIon Ion Pumps

Evidence of Agilent’s 60-year commitment to providing confidence-inspiring solutions for extreme high vacuum (XHV) and ultra high vacuum (UHV) applications. Read the ion pump story.

VIP 200 pump

Innovative, compact, and versatile, the Agilent VIP 200 is the first ion pump to deliver maximum pumping speed at low pressure, breaking new ground in XHV and UHV applications. Get product details.

The making of an ion pump


Versatile, intelligent pump control—The VacIon Plus pump family is complemented by the new 4UHV Ion Pump controller that provides different power levels and interface capabilities. See the infographic on 4UHV Ion Pump Controller.

Versatility—The 4UHV is available in different configurations to independently power, control, and monitor any combination of multiple pumps of different sizes, from one to four pumps, from 10 to 2500 l/s.

Intelligence—The controller uses the same protocol as our other intelligent vacuum devices, giving you fast, convenient access to all elements of the vacuum system.

Optimized pumping speed—The 4UHV will select the right operating voltage to optimize the pumping speed of your ion pumps, resulting in the best possible pumping performance at any pressure.

See Agilent in action with clean, high and ultra-high vacuum

High energy physics

X-ray research

Gravitational waves research

Academia, research, and industrial

In 1957 the Ion Pump is invented by Jepsen, Helmer and Hall at Varian Vacuum, now Agilent Vacuum. In 1967, Varian opened the Torino factory specifically to manufacture ion pumps for the first CERN experiment.

Actually the first ion pump were requested for the construction of the CERN center itself. One of the first large installations of sputter ion pumps (300 pumps; pumping speed of 400 l/s) was the hadron collider ISR that ran at CERN from 1971 to 1984.

The StarCell ion pump, specifically designed for the LEP project, was developed in Torino in 1983. More than 1,000 StarCell ion pumps have been built for this project.

Agilent ion pumps continue to be critical to particle physics milestones, such as the discovery of the Higgs boson on the Large Hadron Collider.

Brochure: 60 years of UHV innovation. Learn more on the invention that made Ultra-High Vacuum possible.

PPT slideset: Ion Pumps for UHV Systems, Synchrotrons & Particle Accelerators. How Agilent Ion Pumps address the specific vacuum requirements of High Energy Physics research.

PPT slideset: Ion Getter Pumps CAS-2017 Cern Accelerator School. A deeper dive in Ion Pump technology and its latest developments.

Agilent In-line Ion pumps integrated into a transport beam-line at X-FEL/Desy

XFEL—X-Ray Free Electron Laser

XFEL—a groundbreaking X-ray research site under construction in Hamburg, Germany—will generate X-ray flashes 1 billion times more brilliant than the best conventional sources. These extremely short and coherent X-ray flashes will enable new atomic-scale investigations of cells, reactions, and nanoparticles. 350 in-line ion pumps from Agilent help make this possible.

Read the brochure to learn about in-line ion pumps.

LIGO/KAGRA: Detection of Gravitational Waves

The Laser Interferometer Gravitational-Wave Observatory (LIGO) is designed for direct detection of gravitational waves predicted by Einstein’s General Theory of Relativity. LIGO consists of two interferometers within the United States that depend on stable high vacuum—provided by Agilent ion pumps—for reliable operation.

Ion Pumps for Gravitational Waves

Video from Italian national RAI3 channel


KAGRA is a gravitational wave detector under construction in Japan. Creating ultraclean and stable high vacuum is instrumental to the operation of this system; uptime, reliability, and vibrationless operation are an absolute requirement for such detectors. Agilent VIP1000 Ion Pumps will be a key part of the vacuum system designed to fulfill these stringent criteria.

Agilent TwisTorr 304 FS success stories

TwisTorr 304 FS installed in a load lock of an UHV system

TwisTorr 304 FS has been tested on the system load lock used for the combination of deposition, analysis and post deposition treatment techniques. The load lock chamber is installed on one end of the tunnel and is isolated with a gate valve. LL is equipped with TwisTorr 304 FS and a vacuum gauge. Agilent TV301 was used but after the successful evaluation of the 304 FS, the customer has qualified the pump for the system.

Customer feedback: Reliable pump—Good ultimate pressure—Very low noise level

TwisTorr 304 FS installed in a load-lock chamber of a PVD-PECVD coating system

TwisTorr 304 FS installed in the load lock chamber of a PVDSoft Etch and PECVD for wafer sizes up to 200 mm. Thanks to the interface (foreline, water and electrical connection, the position of the Vent Port is the same as the previous model as well as the overall dimension, the TwisTorr 304 FS is fully retrofitable to the V301 that currently equips the system. The 304 FS has a faster pump down with regards to the V301 has been well accepted in this application.

Customer feedback: Full retrofitability with the V301—Better performance (pumpdown) with respect to V301

TwisTorr 304 FS in a buffer gas cooling application

To enable the production of the slow moving molecules a Turbo-molecular pump with very high performance for light gases is necessary and the TwisTorr 304 FS meets the requirement.

“The Agilent’s new TwisTorr 304 FS certainly meets the requirements, it’s compact design and compression ratio for light gasses is impressive.”—Agilent Customer

Customer feedback: High compression ratio—Compact design

Unswerving commitment to anticipating any difficulties that lie in your path

Agilent Vacuum Service and Support

The premium service solution from your trusted vacuum provider.

Agilent Vacuum Multivendor Service

An array of options to meet the needs of your entire vacuum install base.

Agilent’s comprehensive three-point, after-sales program is without peer among vacuum providers

  • Advance Exchange—Our premium Advance Exchange program lets you focus on your business while we take care of the rest.
  • Quality Repair—NEW Specialized Repair Centers bring Agilent Quality standards, know-how, and experience closer to you.
  • Service Plans—A broad range of service contracts with flexible solutions tailored around your business needs.
  • Quick and hassle free turnaround—Refurbished to “As New” specs—Full 1 year warranty.
  • Certified processes and workmanship—Genuine Agilent parts—Typical turnaround 2 weeks.
  • Close to your Business—Gold, Silver, and Bronze service levels—Guaranteed response time.

To learn more about Agilent vacuum service programs for leak detectors, download the brochure.

Agilent provides comprehensive repair and maintenance services for vacuum instruments, regardless of manufacturer, to maximize uptime and simplify administration

Agilent Vacuum Technical Support

  • 3 regional customer support hubs (USA, Europe, China)
  • Toll-free (follow-the-sun extended working hours) in local language
  • Email support with one working day response assure
  • Technical documentation, trouble-shooting assistance
  • Pre- and post-sales consultancy to the right service program choice
Learn more

For your critical applications, don’t settle for just picking a pump—take the extra steps toward complete confidence in your vacuum solution.

Agilent—Vacuum Beyond Specifications