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Fluids for Diffusion Pumps

Fluids for Diffusion Pumps

Agilent recommends NEOVAC SY and SANTOVAC 5 oils for the use with Agilent Diffusion Pumps. NEOVAC SY is a high quality, low cost synthetic organic compound. Its low vapor pressure allows it to achieve base pressures in the low 10-8 Torr range. SANTOVAC 5 has ultra low vapor pressure that allows it to achieve base pressures in 10-10 Torr range and low backstreaming rates.

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