Nanotechnology Instruments
Electron Microscopes in the Laboratory
Nanotechnology instrument applications like electron microscopy have very stringent performance requirements for sensitivity, resolution, sample throughput, and measurement repeatability. These requirements are driven by the need to analyze ever-smaller samples, in semiconductor and life science applications. In the Semiconductor industry more sensitivity is critical for better sample resolution. Manufacturing integrated circuits involves many complex steps that require use of high-purity gases under vacuum conditions in process chambers. Semiconductor applications such as microlithography, low-pressure chemical vapor deposition, ion-beam etching, sputtering, ion-beam implantation and molecular beamepitaxy all require high vacuum maintenance. Distribution systems that deliver gases must be tightly sealed to prevent emissions and maintain gas purity. Helium leak detection is used to test the process gas components.
Agilent provides a range of expert services to support the ongoing productivity and accuracy of your vacuum equipment.
Maintenance support is provided by highly-trained global teams who help to maintain pump, instrument and system productivity both in-house, with dedicated Factory Service, and on-site. Expert diagnosis and repair Field Service ensure a fast and convenient resolution of problems, and this is further supported with our Remote Care solutions that allow engineers to prevent costly failures and unnecessary service calls through advanced monitoring.
Our Extended care service helps to guarantee the long-term performance of your systems and components after warranties expire, and Advanced Replacement & Exchage solutions are available, enabling critical replacement equipment to be shipped overnight.
In addition, special Upgrade Programs are available that ensure efficient and seamless replacements of vacuum technology, whether products have reached their end of life or are being refreshed for newer specification technology.
Learn more about the strategic advantage of Agilent Vacuum Product Services.