X3513-64060
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TwisTorr 305-ICQ Turbo Pump with Integrated Controller

Part Number:
X3513-64060

TwisTorr 305-ICQ turbo pump with integrated controller, high throughput, DN 100 ISO-K, water cooling, RS485

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$13,866.00 /1 Each
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Specifications
Ambient Operating Temperature
  • +5 to +35 ��C
Ambient Storage Temperature
  • -40 to +70 ��C
Base Pressure
  • < 1 x 10-10 Torr
  • < 1 x 10-10 mbar
Compression Ratio H2
  • 2 x 104
Compression Ratio He
  • 1 x 105
Compression Ratio N2
  • 2 x 108
Cooling Method
  • Water cooling
Flange Type
  • ISO 100 K
Foreline Flange Size
  • KF 16 NW
Height
  • 191.57 mm
Length
  • 174.80 mm
Maximum Gas Throughput - He, Water Cooling
  • 500 sccm
Maximum Gas Throughput - N2, Water Cooling

  • 380 sccm
Noise Level
  • 41 dB(A)
Pumping Speed - H2
  • 220 L/s
Pumping Speed - He
  • 255 L/s
Pumping Speed - N2
  • 250 L/s
Standards and Certifications
  • EN 61010-1
    EN 61326-1
    EN 1012-2
    EN 12100
    EN 50581
    Machinery Directive 2006/42/EC
    Electromagnetic Compatibility Directive 2014/30/
    EU Directive 2011/65/EU
Weight
  • 5.74 kg
Width
  • 144 mm