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TwisTorr 84 FS Turbo Pump

Part Number:
X3502-64300

TwisTorr 84 FS turbo pump, dual flow

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Specifications
Ambient Operating Temperature
  • +5 to +35 °C
Ambient Storage Temperature
  • -40 to +70 °C
Base Pressure
  • <5 x 10-9 mbar
Compression Ratio Ar
  • >1 x 1010
Compression Ratio H2
  • 5 x 104
Compression Ratio He
  • >1 x 105
Compression Ratio N2
  • >1 x 1010
Cooling Method
  • Air cooling
  • Water cooling
Diameter
  • 97 mm
Flange Type
  • DN 63
  • KF 16
Foreline Flange Size
  • KF 16 NW
Height
  • 148.27 mm
Maximum Gas Throughput - Ar, Water Cooling
  • 70 sccm
Maximum Gas Throughput - N2, Water Cooling
  • 100 sccm
Noise Level
  • 40 dB(A)
Pumping Speed - Ar
  • 66 L/s
Pumping Speed - H2
  • 52 L/s
Pumping Speed - He
  • 50 L/s
Pumping Speed - N2
  • 54 L/s
Standards and Certifications
  • CE, C-CSA-US, RoHS
    compliant as per 2011/65/UE
Weight
  • 2.05 kg