Specifications
Ambient Operating Temperature |
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Ambient Storage Temperature |
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Base Pressure |
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Compression Ratio H2 |
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Compression Ratio He |
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Compression Ratio N2 |
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Flange Type |
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Foreline Flange Size |
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Maximum Gas Throughput - Ar, Water Cooling |
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Maximum Gas Throughput - N2, Water Cooling |
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Noise Level |
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Pumping Speed - H2 |
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Pumping Speed - He |
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Pumping Speed - N2 |
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Standards and Certifications |
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Weight |
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