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TwisTorr 84 FS Turbo Pump

Part Number:
X3502-64200

TwisTorr 84FS SEM Split Flow Turbo Pump

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List Price:
$6,493.00 /1 Each
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Specifications
Ambient Operating Temperature
  • +5 to +35 °C
Ambient Storage Temperature
  • -40 to +70 °C
Base Pressure
  • <5 x 10-10 mbar
Compression Ratio H2
  • 5 x 104
FlangeType
  • DN 63
  • KF 40
Foreline Flange Size
  • KF 16 NW
Maximum Gas Throughput - Ar, Water Cooling
  • 70 sccm
Maximum Gas Throughput - N2, Water Cooling
  • 100 sccm
Noise Level
  • 40 dB(A)
Pumping Speed - Ar
  • 66 L/s
Pumping Speed - H2
  • 53 L/s
Pumping Speed - He
  • 63 L/s
Pumping Speed - N2
  • 67 L/s
Standards and Certifications
  • CE, C-CSA-US, RoHS
    compliant as per 2011/65/UE
Weight
  • 2.05 kg