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VHS-6 Diffusion Pump

Part Number:
MSPLD10640

VHS-6 diffusion pump, ISO 200K, with extended cold cap, 480 V, 2200 W

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Specifications
Cap Type
  • Extended cold cap
Flange Type
  • ISO 200 K
Input Voltage
  • 480 V
Pump Power
  • 2200 W