9698930
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Turbo-V 1001 Navigator Pump

Part Number:
9698930

Turbo-V 1001 Ion Implantation Navigator pump (IIN), DN 200 ISO-K, inlet flange

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List Price:
$40,543.00 /1 Each
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Specifications
Ambient Operating Temperature
  • +5 to +35 °C
Ambient Storage Temperature
  • -20 to +70 °C
Base Pressure
  • <1 x 10-10 mbar
Compression Ratio H2
  • 1 x 106
Compression Ratio He
  • 1 x 107
Compression Ratio N2
  • 1 x 109
Flange Type
  • ISO 200 K
Foreline Flange Size
  • KF 40 NW
Maximum Gas Throughput - Ar, Water Cooling
  • 7.5 mbar L/s; 444 sccm
Maximum Gas Throughput - N2, Water Cooling
  • 10 mbar L/s; 592 sccm
Noise Level
  • 45 dB(A)
Pumping Speed - H2
  • 920 L/s (DN 250 flange)
Pumping Speed - He
  • 900 L/s (DN 250 flange)
Pumping Speed - N2
  • 1050 L/s (DN 250 flange)
Standards and Certifications
  • UNI EN 292-1 UNI EN 292-2 EN-CENELEC 55011 IEC 1000-4-2 (ex 801-2) IEC 1000-4-3 (ex 801-3) IEC 1000-4-4 (ex 801-4) EN 61010-1 (IEC 1010-1) EN 1012-2
Weight
  • 21.2 kg