Ion CombiNEG pumps combine the state-of-the-art Agilent (formerly Varian) ion pump technology with the SAES Non-Evaporable Getter (NEG) sintered cartridge. These combination ion pumps with sintered NEG cartridges provide enhanced pumping speed for getterable gases, methane, and noble gases and reach pressures as low as 10-12 mbar.
The easy insertion of the NEG cartridge into the ion pump makes the Ion CombiNEG pump a smart solution, combining ion pump and NEG cartridge technologies in the same pump volume.
Agilent offers 3 Ion CombiNEG pump configurations based on pump and cartridge sizes: 40-400, 150-1000, 150-2000.
The most typical applications include
- • Particle accelerators
- • Synchrotron radiation sources and related equipment
- • Surface science
- • Scanning Electron Microscope (SEM)
- • General ultrahigh vacuum (UHV) and extreme-high vacuum (XHV) applications