Agilent Turbo Pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. Turbo Pumps require minimal to no maintenance and provide protection from misuse. Agilent experts can help with your applications, support or custom design of the system to meet your needs whether you are an end-user or an OEM.
Typical Turbo Pump Applications
| Mass Spectrometry and Analytical Instrumentation |
- Full line of pumps and controllers optimized for MS systems
- Customize pumps with multi-inlet pumping systems
- Cost-effective, easy-to-use, high-performance analytical power
- For GC/MS, one vacuum chamber in relatively low gas load environments and intermediate vacuum interface to analyze inorganic samples
- For LC/MS, require multi-chamber, high throughput vacuum systems
- For ICP-MS, a wide range of vacuum systems including pumps for heavy carrier gases such as argon, and collision cell designs with helium
- For TOF systems, the small size, high throughput and efficient heat dissipation required
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- Mass Spectrometry
- GC/MS
- LC/MS
- ICP-MS
- TOF
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| Vacuum in Research and Development |
- Extremely clean, reliable and cost effective HV and UHV
- Rough vacuum bearings not exposed to UHV, reduce contamination
- High speed and compression
- Mounted in any orientation
- Combine Turbo-V and TriScroll dry pumps to pump large volumes of gas
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- High Energy Physics
- Fusion Technology
- General UHV Research
- Synchrotron Light Sources Particle Accelerators
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| Industrial Vacuum Processing |
- Integrated, application-specific pumping solution designed for thin film deposition equipment
- Expertise with both OEMs and end users
- Pumps for single chamber batch systems, multiple chamber systems, with load locks, or large inline continuous systems
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Thin Film Deposition:
- Glass coating equipment (architectural and automotive glass, flat panel displays)
- Thin film solar cells production (photo-voltaic)
- Optical data media (CD, DVD, Magneto Optical Discs)
- Magnetic storage media
- Surface treatments
- Optical coating (ophthalmic, precision opto-electronics)
- Roll/Web coating on films or foils
Device Processing:
- TV & Monitor picture tube manufacture
- Evacuation of lamps (motorway lighting, beamers)
- X-Ray tubes & electron devices
General Processes:
- Vacuum furnaces / metallurgy
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| Nanotechnology Instruments |
- Analyze all types of substances from organic compounds to semiconductor wafers
- Full range of high and ultra-high vacuum pumps designed especially for the demanding requirements of SEM, TEM and surface analysis systems
- Low vibration turbo pumps for the most sensitive microscopy
- Fast, oil-free air evacuation of large sample chambers
- Integrated pump controllers that offer control flexibility with near zero electromagnetic noise generation
- Critical in creation of environment for semiconductor manufacturing
- High rotational speeds provide high pumping speed for light gases (He, H) liberated in semiconductor production
- Meet demanding rapid cycle applications, such as vacuum load locks
- Improve tool reliability by sharing a single roughing pump across multiple turbo pumps
- Combine Turbo-V and TriScroll dry pumps to pump large volumes of gas
- Rack mounted controller or on board controller allows for remote placement of electronics
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- Electron Microscopy(SEM, TEM)
- Focused Ion-beam Systems (FIB)
- Surface Analysis
- Semiconductor Manufacturing
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