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Diffusion Pumps

Agilent VHS and HS diffusion pumps have pumping speeds from 65 L/s to 28,000 L/s, in an operating range of 1 x 10-3 Torr to 5 x 10-9 Torr. Our patented bulge body diffusion pump design maximizes pump throughput while delivering pressure stability...

Diffusion Pump Accessories

Agilent diffusion pump accessories include baffles, fluids, heaters, cold caps, and more. Agilent accessories keep your diffusion pumps functioning properly and efficiently.

Small Diffusion Pumps

Agilent's small diffusion pumps have robust boiler designs and fully optimized jets. They offer high pumping speeds, high forepressure, low cost of ownership, and ease of maintenance. These pumps have pumping speeds from 65 to 5,000 L/s.

Large Diffusion Pumps

Agilent's large oil diffusion pumps provide high throughput with a high tolerable forepressure. These highly-efficient pumps come with full thermal protection and optional quick-cool coils. The pumps are available with ASA or ISO flanges.

Diffusion Pump Repair & Spare Parts

OEM parts for your Agilent or Varian diffusion pumps

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Find the right heaters, o-rings, thermal switches, oil, sight glass, or other spare parts and consumables for your Agilent (Varian) diffusion pump to keep its performance at peak levels. Only parts from the original equipment manufacturer ensure fit, form, and function for your diffusion pump. Common spare parts and consumables are stocked for fast delivery, and can be ordered easily from our online store.|Use the online chat to talk to our experts to identify the right parts for your diffusion pump or get advice on achieving optimal pump performance.

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AX-65 Diffusion Pump

Smallest diffusion pump and the only one available with air cooling system

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The Agilent AX-65 oil diffusion pump is the smallest diffusion pump available in the market and the only pump that is air-cooled. Its vertical finned boiler and high power provide stable pumping and high helium pumping speed. This pump can be ordered with a cold cap or a dense baffle. The pump includes a fluid-level sight glass that indicates the fluid level at all times.|This pump is a perfect fit for instrumentation applications such as Gas Chromatography Mass Spectrometry (GCMS) and centrifuges.

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VHS-10 Diffusion Pump

Patented design increases gas capture and has a high pumping speed of 3650 L/s

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The VHS-10 Diffusion Pump has a pumping speed of up to 3650 L/s and can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages. The patented Bulge Contour increases gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life.|This vapor jet pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

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HS-16 Diffusion Pump

High throughput pump with a high pumping speed of 6000 L/s

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The Agilent HS-16 oil diffusion pump is a pump with high throughput and high pumping speed of 6000 L/s. With its fully optimized vapor jet, the robust boiler design and the thermal protection switches the pump will run without any maintenance for many years. It is available with 16 in. ASA or ISO 500K inlet flange.|This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

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VHS-4 Diffusion Pump

Patented design increases gas capture and has a high pumping speed of up to 750 L/s

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The VHS-4 diffusion pump has a pumping speed of up to 750 L/s and can be ordered with ASA or ISO flanges, standard or extended cold caps, with a variety of voltages. All VHS pumps have a stainless steel pump body and a sight glass/fill and drain assembly for continuous monitoring and easy maintenance of pump fluid. The patented Bulge Contour increases gas capture and maintains lower pressure. Finned boilers increase surface area, prolonging pumping fluid life.|This vapor jet pump is a perfect fit for high vacuum and industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

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VHS-250 Diffusion Pump

Patented design increases gas capture and has a high pumping speed of up to 2125 L/s

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The VHS-250 diffusion pump has a pumping speed of up to 2125 L/s. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. The patented Bulge Contour increases gas capture and maintains lower pressure. Finned boilers increase surface area, prolonging pumping fluid life.|This vapor jet pump is a perfect fit for high vacuum and industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

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NHS-35 Diffusion Pump

High throughput pump with a high pumping speed of 28,000 L/s

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The Agilent NHS-35 oil diffusion pump is a pump with high throughput and high pumping speed of 28,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 35 in. ASA or ISO 1000F (bolted) inlet flange.|This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

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VHS-6 Diffusion Pump

Patented design increases gas capture and has a high pumping speed of up to 1550 L/s

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The VHS-6 Diffusion Pump has a pumping speed of up to 1550 L/s and can be ordered with ASA or ISO flanges, standard or extended cold caps, with a variety of voltages. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. The patented Bulge Contour increases gas capture and maintains lower pressure. Finned boilers increase surface area, prolonging pumping fluid life.|This Vapor Jet Pump is a perfect fit for high vacuum and industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

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HS-2 Diffusion Pump

High throughput pump with a high pumping speed of 160 L/s

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The Agilent HS-2 oil diffusion pump is a pump with high throughput and high pumping speed of 160 L/s air, 200 L/s He, H₂. With its fully optimized vapor jet and the robust boiler design, the pump will run without any maintenance for many years. It is available with an ASA inlet flange and with 120 V or 240 V.|This pump is a perfect fit for instrumentation applications such as Gas Chromatography Mass Spectrometry (GCMS) and centrifuges.

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HS-32 Diffusion Pump

High throughput pump with a high pumping speed of 17,300 L/s

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The Agilent HS-32 oil diffusion pump is a pump with high throughput and high pumping speed of 17,300 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 32 in. ASA or ISO 800F (bolted) inlet flange.|This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

Heaters & Heater Components for Diffusion Pumps

Externally fixed heaters with robust design for temperature stability

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Agilent diffusion pump heaters are very robust and optimized for the use with the boiler design. They can be easily exchanged and serviced without draining the fluid.

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VHS-400 Diffusion Pump

Patented design increases gas capture and has a high pumping speed of up to 4500 L/s

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The VHS-400 diffusion pump has a pumping speed of up to 4500 L/s. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. The patented Bulge Contour increases gas capture and maintains lower pressure. Finned boilers increase surface area, prolonging pumping fluid life.|This Vapor Jet Pump is great for high vacuum applications. This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for architectural glass and the automotive industry.

Fluids for Diffusion Pumps

High quality diffusion pump oil with ultra low vapor pressure 

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Agilent recommends Agilent SY and SANTOVAC 5 oils for the use with Agilent Diffusion Pumps. Agilent SY is a high quality, low cost synthetic organic compound. Its low vapor pressure allows it to achieve base pressures in the low 10^-8 Torr range. SANTOVAC 5 has ultra low vapor pressure that allows it to achieve base pressures in 10^-10 Torr range and low backstreaming rates.

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HS-20 Diffusion Pump

High throughput pump with a high pumping speed of 10,000 L/s

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The Agilent HS-20 oil diffusion pump is a pump with a high throughput and high pumping speed of 10,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 20 in. ASA or ISO 630K inlet flange.|This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics, and protective film layers.

O-Rings, Sight Glass Kits & Thermal Switches for Diffusion Pumps

For reliable sealing connections and over-heating protection

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Agilent o-rings and centering rings for diffusion pumps help create reliable seals with your system. Diffusion pump thermal switches prevent system over-heating conditions and replacement sight glass kits allow replacement of damaged sight glasses or gaskets.

Replacement Baffles, Water Fittings & Cold Caps for Diffusion Pumps

Accessories to decrease backstreaming and outgassing

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Agilent water-cooled Halo Baffles provide nearly twice the speed at the pump inlet as that achieved with other baffles. They do not add any height to the system. These baffles are very economical and decrease backstreaming and outgassing.|Agilent extended Cold Cap is an option that fits inside the VHS-4, VHS-6 and VHS-10 pumps. It replaces the standard cold cap to reduce backstreaming, yet it retains 80% of the pump's speed.