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Variable Leak Valve

Special valve to control small gas flow into ultrahigh vacuum systems—manually actuated

Quick View BUY PRODUCTS
The Agilent variable leak valve includes a movable piston with an optically flat sapphire that meets a captured metal gasket. This forms a seal completely free from friction, seizing, and shear. The sapphire’s movement is controlled through a threaded shaft-and-lever mechanism that provides a mechanical advantage of 13,000 to 1.
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9515106

Variable leak valve, with 1.125 inches, (NW16) ConFlat flange gas inlet

  • Unit:

    1 Each

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9515117

Adapter kit, for Agilent variable leak valve, 1.33 in ConFlat to flare fitting

  • Unit:

    1 Kit

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9530072

Sapphire assembly for variable leak valve

  • Unit:

    1 Each

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9535050

Gasket assembly for variable leak valve

  • Unit:

    1 Each

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9620014

Repair and tool kit, for variable leak valve

  • Unit:

    1 Kit

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SR0061417400

Sapphire seal removal tool, for variable leak valve

  • Unit:

    1 Each

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Data Sheets
Agilent Variable Leak Valve (PDF)

Technical and specification information for the Variable Leak Valve product

  • Publication Part Number: 5994-2150EN
  • Created: 12 June 2020
  • 495 KB
  • PDF
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User Manuals
Variable leak valve Model 951-5106 User Manual (PDF)

Instructions for use and technical specifications for the Variable Leak Valve Model 9515106

  • Publication Part Number: 87-400-085-01 (D)
  • Created: 05 Feb 2013
  • 1 MB
  • PDF
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Catalogs
Agilent Vacuum Valves (PDF)

Features, benefits, technical specifications and ordering instructions for Agilent's extensive line of vacuum valves.

  • Created: 25 Sep 2014
  • 5 MB
  • PDF
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Certificate of Conformance
Agilent Vacuum Product Declarations of Conformity Reference List (PDF)

Contains a reference list of Vacuum Products Declarations of Conformity. Each vacuum product is shipped with the specific Declaration of Conformity.

  • Publication Part Number: Version dtd March 9th, 2026
  • Created: 09 Mar 2026
  • 115 KB
  • PDF
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Brochures
UHV and Leak Detection Solutions (PDF)

This brochure provides details on Agilent’s comprehensive portfolio of essential components and advanced solutions specifically designed for academic and high-tech environments.

  • Publication Part Number: 5994-8433EN
  • Created: 10 June 2025
  • 3 MB
  • PDF
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Brochures
Vacuum and Leak Detection Reference: Formulas, Properties, and Glossary (PDF)

This reference helps users to keep important properties, formulas, and terms used in vacuum technology at their fingertips.

  • Publication Part Number: 5994-5366EN
  • Created: 27 Oct 2022
  • 1 MB
  • PDF
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Catalogs
安捷伦科技真空产品选型手册 (PDF)

中文版安捷伦科技真空产品选型手册，简要产品目录

  • Publication Part Number: 5994-7521ZHCN
  • Created: 01 May 2024
  • 10 MB
  • PDF
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Vacuum Technologies Webinar Library

Join us to learn more about Vacuum Technologies and their applications!

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Scroll Pump Upgrades

Upgrade to the latest in scroll pump technology and reliability

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Agilent supports customers with upgrade paths from their existing scroll pumps to the latest Agilent designs. Switch to the newest IDP models that are easier to service, quieter, have longer tip seal life, and offer the option of an integrated isolation valve. Inverter driven models with variable speed control and full input/output communications are also available.|The Technology Refresh program is a cost-effective way to trade up to the newest Agilent scroll pump. Most pumps are stocked locally and are available to ship in days not weeks.| Use the online chat to talk to our experts today and determine which of the latest scroll pumps fits your needs best.

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4UHV Ion Pump Controller

Multichannel ion pump controller with positive or negative polarity HV output

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The Agilent 4UHV Ion Pump Controller enables you to power, control, and monitor up to four ion pumps simultaneously and independently. The 4UHV starts and controls ion pumps of any type (diode, noble diode, StarCell, triode) and size (from 2 to 2,500 L/s). A large four-line LCD display allows simultaneous reading of individual pump voltage, current, and pressure.|Select the 4UHV if you are running 1–4 Agilent, Varian, or other ion pumps. It features preprogrammed pump configurations for Agilent pumps along with programmable outputs for operation of any other ion pump. STEP voltage and IProtect ensure optimum pumping speed and pressure reading from starting pressure to XHV.
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Data Sheets
Atomx XYZ Data Sheet (PDF)

Atomx XYZ Data Sheet

  • Created: 21 Nov 2017
  • 484 KB
  • PDF
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Applications
China MEE Method HJ639 with the Teledyne Tekmar Atomx XYZ P&T and Agilent GC/MSD (PDF)

Ministry of Ecology and Environment Method HJ639 was used to determine volatile organic compound concentration in water, using the Agilent 7890B/5977B GC/MSD system.

  • Publication Part Number: 5994-4447EN
  • Created: 15 Feb 2022
  • 390 KB
  • PDF
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Applications
China MEE Method HJ605 with the Teledyne Tekmar Atomx XYZ P&T and Agilent GC/MSD (PDF)

Ministry of Ecology and Environment Method HJ639 was used to determine volatile organic compound concentration in soil matrices, using the Agilent 7890B/5977B GC/MSD system.

  • Publication Part Number: 5994-4446EN
  • Created: 15 Feb 2022
  • 330 KB
  • PDF

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