MEMS/NEMS Device Measurement Solution
Accelerate Your Research, Development, and Manufacturing Efficiency
MEMS (Micro Electro Mechanical Systems) is the technology to build very small devices, whose range is generally from a millimeter to a micrometer. NEMS (Nano Electro Mechanical Systems) is similar but its range is a nanometer. MEMS/NEMS device is the integrated device, on which movable parts, sensor, actuator, and electronic circuit are built by MEMS/NEMS technology.
Agilent Technologies offers several instruments to help the R&D activity of the MEMS/NEMS device.
Agilent can help you to establish more accurate device modeling, more efficient failure analysis, and better process by the solutions below.
Measurements, Example Devices & Solutions
| Displacement→Electric Signal Transducer Technology (Sensor) | |||
|---|---|---|---|
| Electrostatic | Piezoelectric | Magneto-impedance | |
| Pressure Sensor | X | X | - |
| Accelerometer | X | X | X |
| Gyroscope | X | X | - |
| Flow Sensor | - | X | - |
| Magnetometer | - | - | X |
| Electric Signal→Displacement Transducer Technology (Actuator) | ||||
|---|---|---|---|---|
| Electrostatic | Electromagnetic | Piezoelectric | Other Information | |
| Optical Switch | X | X | - | Optical Evaluation |
| Optical Scanner | X | X | X | Optical Evaluation |
Documents & Downloads
| Title/Description | Date | Type | |||
|---|---|---|---|---|---|
 PDF
804 KB
|
Accelerate Your MEMS Device Development and Manufacturing Efficiency This brochure describes a general overview of Agilent's capabilities in MEMS device testing and generates awareness of Agilent impedance MEMS test solution to customer. |
2007-11-12 | Brochure | ||
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PDF
201 KB
|
Accurate Evaluation of MEMS Piezoelectric Sensor and Actuator using the 4294A This application brief describes the benefits of using the Agilent 4294A for device characterization of MEMS piezoelectric sensors and actuators, along with its wide variety of analysis functions and features and how it improves design efficiency. |
2007-04-06 | Application Note | ||
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PDF
235 KB
|
Characterizing MEMS Magneto-Impedance Sensor using the Agilent Impedance Analyzer This application brief describes the benefits of using Agilent impedance analyzers for device characterization of MEMS Magneto-Impedance (MI) sensors. |
2007-03-31 | Application Note | ||
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PDF
243 KB
|
Improving the Test Efficiency of the MEMS Capacitive Sensor using the E4980A This application brief describes the features of the Agilent E4980A and how it can dramatically improve the test efficiency of MEMS capacitive sensors. |
2007-04-13 | Application Note | ||
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PDF
121 KB
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Characterizing Electromagnetic MEMS Optical Switch Actuator using the E4980A This application brief describes how the Agilent E4980A improves the test efficiency of electromagnetic MEMS optical switch actuators. |
2007-04-04 | Application Note | ||
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PDF
202 KB
|
Characterizing Electromagnetic MEMS Optical Scanner using the E4980A This application brief describes how the Agilent E4980A can greatly improve the test efficiency of electromagnetic MEMS optical scanners. |
2007-04-04 | Application Note | ||
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PDF
206 KB
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Improving Test Efficiency of MEMS Electrostatic Actuator using the E4980A This application brief describes how the Agilent E4980A can greatly improve the test efficiency of MEMS electrostatic actuators. |
2007-04-12 | Application Note | ||
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PDF
325 KB
|
MEMS On-wafer Evaluation in Mass Production This application note describes how to evaluate MEMS elements in the on-wafer stage in order to lower the total production cost in mass production. |
2008-02-19 | Application Note |
Related Links
- E4991A RF Impedance/Material Analyzer
The E4991A RF impedance/material analyzer offers ultimate impedance measurement performance and powerful built-in analysis function. - E5070B ENA RF Network Analyzer
The E5070B ENA network analyzer provides the comprehensive measurement capability for both multiport and balanced devices up to 3 GHz. - E5071B ENA RF Network Analyzer
The E5071B ENA network analyzer provides the comprehensive measurement capability for both multiport and balanced devices up to 8.5 GHz. - E4980A Precision LCR Meter, 20 Hz to 2 MHz
The E4980A precision LCR meter provides the best combination of accuracy, speed, and versatility for a wide range of component measurements. - E5071C ENA Network Analyzer
The E5071C ENA network analyzer provides the comprehensive measurement capability frequency up to 20 GHz. - 4294A Precision Impedance Analyzer, 40 Hz to 110 MHz
The 4294A precision impedance analyzer is an integrated solution for efficient impedance measurement and analysis of a wide variety of components, circuits, and materials.