Electron Microscopes in the Laboratory
Nanotechnology instrument applications like electron microscopy have very stringent performance requirements for sensitivity, resolution, sample throughput, and measurement repeatability. These requirements are driven by the need to analyze ever-smaller samples, in semiconductor and life science applications. In the Semiconductor industry more sensitivity is critical for better sample resolution. Manufacturing integrated circuits involves many complex steps that require use of high-purity gases under vacuum conditions in process chambers. Semiconductor applications such as microlithography, low-pressure chemical vapor deposition, ion-beam etching, sputtering, ion-beam implantation and molecular beamepitaxy all require high vacuum maintenance. Distribution systems that deliver gases must be tightly sealed to prevent emissions and maintain gas purity. Helium leak detection is used to test the process gas components.